1. Core Principle
Silane characteristics: SiH₄ is colorless, odorless, and highly flammable. It can spontaneously ignite in air (low autoignition temperature). The combustion reaction is:
SiH4 + 2O2 ---high temperature/autoignition--- SiO2 (dust) + 2H2O
This reaction releases a large amount of heat; if the concentration is uncontrolled, it can easily explode. Therefore, controlled dilution and forced combustion are necessary.
Working Process (Typical)
Pre-dilution: The exhaust gas is first mixed with nitrogen/air to control the SiH₄ concentration below 25% of the lower explosive limit (LEL), eliminating the risk of deflagration.
Combustion chamber incineration: The mixture enters a high-temperature combustion chamber (above 800℃, usually equipped with an igniter and flame stabilizer), where SiH₄ is completely combusted and decomposed into SiO₂ dust and water vapor.
Post-treatment purification:
Cyclone separation + ceramic filter tubes/baghouse dust collection to capture SiO₂ micro-dust (preventing blockage and emissions);
Spray scrubbing (optional): Removes byproduct acidic gases (such as HF, HCl), ammonia, etc., and neutralizes them for compliant discharge.
Emission: The purified gas is discharged into the atmosphere by an induced draft fan. II. Core Features and Advantages
High Safety: Dilution control + flame monitoring + emergency shutdown, addressing the self-ignition/explosion risk of SiH₄;
High Purification Efficiency: SiH₄ decomposition rate ≥99.9% (up to 99.99% for high-end models), completely eliminating the hazards of highly toxic and flammable substances;
Anti-Clogging Design: Multi-stage dust removal + backflushing, solving the problem of SiO₂ dust easily clogging pipelines/filter materials;
Strong Adaptability: Can handle mixed exhaust gases containing SiH₄, NH₃, HF, etc., compatible with continuous production conditions in semiconductor/photovoltaic industries.
2. Main Application Scenarios
Semiconductor wafer manufacturing (CVD/PECVD epitaxy, oxidation, deposition processes);
Solar cells/photovoltaic modules (crystalline silicon cell deposition, coating);
LED/display panels (MOCVD, PECVD processes);
SiH₄ exhaust gas treatment in other industries such as silicon-based thin films and special gas preparation.
3. Key Design and Operation & Maintenance Points
Safety First: Must include LEL interlocking, flame monitoring, over-temperature alarm, nitrogen purging/emergency venting;
Anti-Clogging Core: Reasonable design of the combustion chamber flow field, selection of high-temperature resistant filter materials + regular backflushing to prevent SiO₂ accumulation;
Material Selection: Hastelloy/310S for high-temperature zones, PP/FRP/fluorine-lined materials for washing zones, ensuring corrosion resistance and high-temperature resistance;
Operation & Maintenance: Regular dust cleaning, inspection of burners/flame detectors, and calibration of monitoring instruments to ensure continuous and stable operation.
Supplementary Information
Aliases: Silane combustion cylinder, silane emergency combustion tower, silane exhaust gas incineration and purification tower;
Difference from ordinary RTO/incinerators: Specifically designed for the high flammability and explosion risk of SiH₄, emphasizing pre-dilution, stable combustion, anti-clogging, and explosion prevention, rather than general VOCs incineration;
Compliance: Meets standards such as the "Comprehensive Emission Standard for Air Pollutants" and "Emission Standard for Pollutants from the Semiconductor Industry," making it a mainstream compliant solution for SiH₄ exhaust gas treatment.
An absorption tower is an elongated vertical column that you will use for the absorption of gases in different industries.It belongs to industry waste gas treatment. 
Industries Served: 
Acid Mist 
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