Control system and precautions
● Stainless steel silane combustion purification tower must ensure negative pressure of about 200Pa.
● An emergency combustion cylinder must be installed behind the vacuum pump of PECVD equipment (see the equipment flow chart).
● Stainless steel silane combustion purification tower must adopt a new process, double fan air extraction, one use one standby.
● The electric regulating valve of the fan inlet must be linked with the fan.
● A disc valve must be installed before the air inlet of the fan to control the negative pressure in the silane combustion purification device.
● Silane combustion purification device fresh air supply outlet must be equipped with a regulating valve.
● 1 ~ 1.5 meters outside the inlet pipe interface must be connected by a dismountable port to prevent the removal of debris from the combustion box.
