Product Category

Stainless Steel Silane Combustion Tower (Cylindrical Type)

Stainless Steel Silane Combustion Tower (Cylindrical Type) is an advanced safety device designed for the efficient combustion and treatment of silane tail gas, widely used in photovoltaic, semiconductor, and new material industries.


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Silane Combustion Tower Cylindrical Silane Combustion Tower Stainless Steel Silane Burner Silane Waste Gas Combustion System

Product Description

Detail Information

Precautions

The cylindrical structure ensures uniform gas flow distribution and excellent stability under high-temperature operation. Manufactured from high-quality stainless steel, the tower offers outstanding corrosion resistance and long service life. It effectively decomposes hazardous silane gas, ensuring safe emission and environmental protection.

Product advantages

✔ Cylindrical design for uniform airflow and stable operation
✔ High-quality stainless steel construction, corrosion and temperature resistant
✔ Efficient silane tail gas decomposition, ensuring environmental safety
✔ Compact structure, easy to install and maintain
✔ Customizable dimensions to meet project requirements

tainless steel silane combustion tower	Type number	CRS－1	CRS－2	CRS－3	CRS－4	CRS－5	CRS－6	CRS－7	CRS－8	CRS－9	CRS－10	CRS-Ⅱ-2	CRS-Ⅱ-4	CRS-Ⅲ-4	CRS-Ⅳ-4
	Treated air volume m3/h	～200	～400	～600	～800	～1000	～1200	～1400	～1600	～1800	～2000	～3500	～7000	～10000	～15000
	Equipment resistance Pa	400
	Silane removal rate %	≥99.99
	Ammonia removal rate %	≥99.99
	Compressed air volume L/min	400										600	1000	1500	2000
	Nitrogen content L/min	200										300	500	800	1000
Select the air distributor	Type number	3A	3A	3A	3A	3.5A/5.5A	3.5A/5.5A	3.5A/5.5A	3.5A/5.5A	3.5A/5.5A	3.5A/5.5A	4A	4A	6A	6C
	Motor power kw	1.5	1.5	1.5	1.5	3/2.2	3/2.2	3/2.2	3/2.2	3/2.2	3/2.2	5.5	5.5	4	7.5
	Motor speed r/min	2900				2900 / 1450						2900	2900	2900	1800
Circulator pump	Type number	KP40-1	KP40-2	KD40-3	KD50-3	KD50-3	KD50-3	KD50-3	KD50-3	KD50-3	KD50-3	KD50-3 KP40-1	KD50-3 KP40-1	KD50-5 KP40-1	KD65-5 KP40-1
	Motor power kw	0.75	1	2.2	2.2	2.2	2.2	2.2	2.2	2.2	2.2	2.2/0.75	2.2/0.75	3.75/0.75	3.75/0.75
	Motor speed r/min	2900
Power source	Electric voltage V	AC380
Power source	frequency Hz	50
Appearance and mounting dimensions	Tower diameter	1200	1200	1200	1200	1400	1400	1400	1400	1400	1400	1400×1900	1400×2400	1400×2400	1400×2800
	Exhaust diameter D1	350	350	350	350	350	350	350	350	350	350	350	350×2	350×2	400×2
	Inlet diameter D2×n(a)	65×1	65×2	65×3	65×4	65×5	65×6	65×7	65×8	65×9	65×10	150×2	150×4	200×4	250×4
	Outlet pipe D3	400	400	400	400	400	400	400	400	400	400	400	500	500	600
	Fresh air intake	100×100												200×200
	derrick A×A	2100×2100												2400×2400
	Tower height H	2800
	h1	500
	h1	750
	h3	≥400
	L1	2800	2800	2800	2800	3000	3000	3000	3000	3000	3000	3500	3500	3500	3500
	L2	6000	6000	6000	6000	7000	7000	7000	7000	7000	7000	7000	7000	7000	7000
	L3	2800	2800	2800	2800	3000	3000	3000	3000	3000	3000	3500	3500	3500	3500
	L4	7000	7000	7000	7000	8000	8000	8000	8000	8000	8000	9000	9000	9000	9000

Control system and precautions

● Stainless steel silane combustion purification tower must ensure negative pressure of about 200Pa.

● An emergency combustion cylinder must be installed behind the vacuum pump of PECVD equipment (see the equipment flow chart).

● Stainless steel silane combustion purification tower must adopt a new process, double fan air extraction, one use one standby.

● The electric regulating valve of the fan inlet must be linked with the fan.

● A disc valve must be installed before the air inlet of the fan to control the negative pressure in the silane combustion purification device.

● Silane combustion purification device fresh air supply outlet must be equipped with a regulating valve.

● 1 ~ 1.5 meters outside the inlet pipe interface must be connected by a dismountable port to prevent the removal of debris from the combustion box.

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Product Category

Stainless Steel Silane Combustion Tower (Cylindrical Type)

Product advantages

Control system and precautions

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