This system is constructed from high-grade stainless steel, ensuring excellent corrosion resistance, long service life, and stable performance under harsh operating conditions.
Based on the spontaneous combustion property of silane (SiH₄) upon contact with air, the system is designed to fully utilize this reaction. When silane-containing exhaust gas enters the combustion chamber, it mixes with air and ignites automatically, completely oxidizing and decomposing the hazardous components.
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The combustion products then pass through a packing layer, where the gas flow is evenly distributed and further cooled before entering the spray scrubbing section. In this chamber, the exhaust gas comes into full contact with a neutral circulating liquid, undergoing a chemical neutralization process that effectively removes residual impurities and soluble gases.
After scrubbing, the treated gas flows into a dehydration unit, where moisture is separated and removed to ensure a clean, dry exhaust. Finally, the purified gas is safely discharged into the atmosphere through a high-efficiency exhaust fan, completing a fully enclosed and automated process from combustion to purification.
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With its compact design, stable operation, and superior purification efficiency, this system not only removes silane and other combustible gases effectively but also significantly enhances safety, reliability, and environmental performance. It serves as an ideal exhaust treatment solution for solar cell manufacturing and semiconductor CVD processes.
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