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Stainless Steel Silane Combustion Tube

The Stainless Steel Silane Combustion Tube is a specialized device designed for the safe combustion and disposal of silane tail gas, which is commonly generated in photovoltaic, semiconductor, and electronics industries.


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Silane Combustion Tube Stainless Steel Silane Combustion Tube Silane Burner Tube Silane Waste Gas Combustion System Silane Tail Gas Treatment

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Our stainless steel silane combustion tower is a high-efficiency waste gas purification system designed for the treatment of silane (SiH₄), ammonia (NH₃), and other soluble exhaust gases. It is widely used in solar cell production lines and CVD (Chemical Vapor Deposition) processes.

The equipment is mainly composed of a stainless steel shell, combustion unit, scrubbing section, and slag discharge system.Compressed air combined with fresh air is used for gas inlet, which significantly improves operational efficiency and reliability.

The spray system adopts a design integrating a circulating water pump and automatic water replenishment, while the exhaust fan uses a dual-fan configuration (one operating, one standby) to ensure continuous and stable operation.

A special pressure relief device is installed inside the combustion chamber, allowing the system to remain stable even under sudden pressure increases. In addition, a nitrogen inlet is equipped for enhanced safety.
For dust collection, the system utilizes static pressure sedimentation, where deposited particles are discharged through a slag outlet, simplifying dust removal and improving efficiency.

Tests conducted by authorized institutions confirm that the silane (SiH₄) removal efficiency reaches ≥99.99%, and the purification rate for ammonia (NH₃) and other water-soluble gases also exceeds 99.99%.

With excellent corrosion resistance, high mechanical strength, superior purification efficiency, and safe, reliable operation, this system performs at an internationally advanced technical level.
It also features low operating cost, low noise, easy maintenance, and a well-optimized structural design, making it an ideal choice for industrial exhaust gas purification applications.

tainless steel silane combustion tower	Type number	CRS－1	CRS－2	CRS－3	CRS－4	CRS－5	CRS－6	CRS－7	CRS－8	CRS－9	CRS－10	CRS-Ⅱ-2	CRS-Ⅱ-4	CRS-Ⅲ-4	CRS-Ⅳ-4
	Treated air volume m3/h	～200	～400	～600	～800	～1000	～1200	～1400	～1600	～1800	～2000	～3500	～7000	～10000	～15000
	Equipment resistance Pa	400
	Silane removal rate %	≥99.99
	Ammonia removal rate %	≥99.99
	Compressed air volume L/min	400										600	1000	1500	2000
	Nitrogen content L/min	200										300	500	800	1000
Select the air distributor	Type number	3A	3A	3A	3A	3.5A/5.5A	3.5A/5.5A	3.5A/5.5A	3.5A/5.5A	3.5A/5.5A	3.5A/5.5A	4A	4A	6A	6C
	Motor power kw	1.5	1.5	1.5	1.5	3/2.2	3/2.2	3/2.2	3/2.2	3/2.2	3/2.2	5.5	5.5	4	7.5
	Motor speed r/min	2900				2900 / 1450						2900	2900	2900	1800
Circulator pump	Type number	KP40-1	KP40-2	KD40-3	KD50-3	KD50-3	KD50-3	KD50-3	KD50-3	KD50-3	KD50-3	KD50-3 KP40-1	KD50-3 KP40-1	KD50-5 KP40-1	KD65-5 KP40-1
	Motor power kw	0.75	1	2.2	2.2	2.2	2.2	2.2	2.2	2.2	2.2	2.2/0.75	2.2/0.75	3.75/0.75	3.75/0.75
	Motor speed r/min	2900
Power source	Electric voltage V	AC380
Power source	frequency Hz	50
Appearance and mounting dimensions	Tower diameter	1200	1200	1200	1200	1400	1400	1400	1400	1400	1400	1400×1900	1400×2400	1400×2400	1400×2800
	Exhaust diameter D1	350	350	350	350	350	350	350	350	350	350	350	350×2	350×2	400×2
	Inlet diameter D2×n(a)	65×1	65×2	65×3	65×4	65×5	65×6	65×7	65×8	65×9	65×10	150×2	150×4	200×4	250×4
	Outlet pipe D3	400	400	400	400	400	400	400	400	400	400	400	500	500	600
	Fresh air intake	100×100												200×200
	derrick A×A	2100×2100												2400×2400
	Tower height H	2800
	h1	500
	h1	750
	h3	≥400
	L1	2800	2800	2800	2800	3000	3000	3000	3000	3000	3000	3500	3500	3500	3500
	L2	6000	6000	6000	6000	7000	7000	7000	7000	7000	7000	7000	7000	7000	7000
	L3	2800	2800	2800	2800	3000	3000	3000	3000	3000	3000	3500	3500	3500	3500
	L4	7000	7000	7000	7000	8000	8000	8000	8000	8000	8000	9000	9000	9000	9000