Our stainless steel silane combustion tower is a high-efficiency waste gas purification system designed for the treatment of silane (SiH₄), ammonia (NH₃), and other soluble exhaust gases. It is widely used in solar cell production lines and CVD (Chemical Vapor Deposition) processes.
The equipment is mainly composed of a stainless steel shell, combustion unit, scrubbing section, and slag discharge system.Compressed air combined with fresh air is used for gas inlet, which significantly improves operational efficiency and reliability.
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The spray system adopts a design integrating a circulating water pump and automatic water replenishment, while the exhaust fan uses a dual-fan configuration (one operating, one standby) to ensure continuous and stable operation.
A special pressure relief device is installed inside the combustion chamber, allowing the system to remain stable even under sudden pressure increases. In addition, a nitrogen inlet is equipped for enhanced safety.
For dust collection, the system utilizes static pressure sedimentation, where deposited particles are discharged through a slag outlet, simplifying dust removal and improving efficiency.
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Tests conducted by authorized institutions confirm that the silane (SiH₄) removal efficiency reaches ≥99.99%, and the purification rate for ammonia (NH₃) and other water-soluble gases also exceeds 99.99%.
With excellent corrosion resistance, high mechanical strength, superior purification efficiency, and safe, reliable operation, this system performs at an internationally advanced technical level.
It also features low operating cost, low noise, easy maintenance, and a well-optimized structural design, making it an ideal choice for industrial exhaust gas purification applications.
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