Product Category

Silane Off-Gas Combustion Treatment System

Silane Off-Gas Combustion Treatment System

This silane off-gas combustion treatment system is designed to safely and effectively treat hazardous exhaust gases containing silane (SiH₄) from photovoltaic manufacturing, semiconductor processes, and specialty gas production.


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Detail Information

Core Advantages

Product Description

Place Of Origin:	CHINA
Processing Capacity:	1200~30000 M3/H
Supply Ability:	50 Sets Per 3 Months
Material:	PP/FRP
Purifying Rate:	>90%
Packaging Details:	Pallets
Highlight:	Purification Tower 30000 M3/H

Utilizing a high-temperature combustion chamber, the system ignites silane and its derivatives in a controlled flame environment, converting them into harmless byproducts such as silicon dioxide (SiO₂) and water vapor. The design ensures stable flame control, fast silane decomposition, and complete combustion to prevent explosion hazards.

Optional components include flame arresters, automatic ignition controllers, redundant safety valves, cooling zones, and downstream filtration or scrubbing stages.

Features:

High thermal efficiency with complete silane decomposition
Flameproof design with multi-layered safety protections
Modular integration with silane gas cabinets and vacuum systems
Available in vertical or horizontal layouts

Applications:

Photovoltaic silicon production lines
PECVD and CVD semiconductor fabrication facilities
Specialty gas filling and recovery stations
Polysilicon manufacturing exhaust systems

1. Description of Silane Off-Gas Combustion Treatment System

Waste Gas Treatment Equipment for Battery, Semiconductor & Lithium Industry

Number	Item	Material	Remarks
1	The maintenance port	PP/PVC	can be used as a viewing window
2	Spray port	PP/PVC
3	tower body	PP
4	filler inlet and outlet	PP/PVC	can be used as a viewing window
C	water inlet	PP
6	reservoir	PP
7	overflow port	PP
8	circulating water outlet	PP
9	sewage outlet	PP
10	air inlet	PP

2. Main product models

Model	Blowing rate M3/H	φ	φ1	φ2	H1	H	Purifying rate >90%	Recommended water pump
XTS-500	1200	500	200	800	1200	3500	>90%	25FP-8
XTS-600	2000	600	200	1000	1200	3500	>90%	25FP-8
XTS-700	3000	700	300	1000	1400	4000	>90%	32FP-11
XTS-800	4000	800	300	1200	1400	4000	>90%	32FP-11
XTS-1000	5000	1000	400	1400	1400	4500	>90%	40FP-18
XTS-1200	6000	1200	450	1600	1600	4500	>90%	40FP-18
XTS-1400	8000	1400	500	1800	1600	5000	>90%	50FP-22
XTS-1600	10000	1600	600	2000	1800	5000	>90%	50FP-22
XTS-1800	15000	1800	700	2200	2000	5500	>90%	50FP-22
XTS-2000	20000	2400	800	2400	2200	5500	>90%	65FP-26
XTS-2200	25000	2600	1000	2600	2500	6000	>90%	65FP-26
XTS-2500	30000	2800	1000	2800	2500	6000	>90%	65FP-26

3. Packaging & Shipping

We can pack it by pallet, or according to the customers' specific requirements.

Port: Shanghai/Ningbo

4. Our Services

In order to guarantee the customers are able fully to operate the machine, if the customer need, we can help customer training, includes:
(1) Correct operating mode
(2) Correct maintenance way
(3) Correct technological process control
(4) Remove simple problem

Any doubt please contact us.