Utilizing a high-temperature combustion chamber, the system ignites silane and its derivatives in a controlled flame environment, converting them into harmless byproducts such as silicon dioxide (SiO₂) and water vapor. The design ensures stable flame control, fast silane decomposition, and complete combustion to prevent explosion hazards.
Optional components include flame arresters, automatic ignition controllers, redundant safety valves, cooling zones, and downstream filtration or scrubbing stages.
Features:
High thermal efficiency with complete silane decomposition
Flameproof design with multi-layered safety protections
Modular integration with silane gas cabinets and vacuum systems
Available in vertical or horizontal layouts
Applications:
Photovoltaic silicon production lines
PECVD and CVD semiconductor fabrication facilities
Specialty gas filling and recovery stations
Polysilicon manufacturing exhaust systems
