Silane Combustion Tower

The Silane Combustion Tower is a purification system designed to treat soluble exhaust gases such as silane and ammonia produced in solar cell production lines and Chemical Vapor Deposition (CVD) processes. Its working principle utilizes the spontaneous combustion characteristics of silane when exposed to air. The exhaust gas is first directed into a combustion chamber for burning, then the combusted gas enters a purification tower, where it undergoes secondary treatment through spray absorption with neutralizing liquid. Finally, the purified gas is discharged through an exhaust fan after meeting emission standards.

Main Functions and Roles

• Exhaust Gas Purification: Efficiently removes toxic and harmful gases such as silane and ammonia to ensure emissions meet environmental regulations.

• Secondary Purification: After combustion, the exhaust gas enters the purification tower for spray scrubbing and packing absorption to further eliminate residual pollutants.

• Safe Treatment: Transforms hazardous gases into harmless substances through combustion and absorption, ensuring operational safety.

  
  

Working Principle

• Combustion: Silane exhaust gas enters the combustion chamber via pipelines, where it spontaneously ignites upon contact with air.

• Absorption: The combusted gas flows into the purification tower and fully contacts the sprayed neutralizing solution (such as circulating neutralizing liquid) for counter-current absorption.

• Spraying: The purification tower includes a spray chamber that uses pumps to spray the neutralizing liquid, ensuring efficient gas–liquid contact.

• Dehydration: The treated gas passes through a demister before being discharged by an exhaust fan.

Key Features

• Corrosion Resistance: Typically constructed from stainless steel for excellent corrosion resistance.

• High Strength: Robust structure ensures long-term stable operation.

• High Efficiency: Delivers high purification performance meeting strict environmental standards.

• Safety: Equipped with dual fans (one in use, one standby) and an emergency water supply system for improved reliability and safety.

  
  

Applicable Industries

• Solar cell production lines

• Chemical Vapor Deposition (CVD) process lines